Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation

被引：1
作者：
Zhu M. [1 ]
Huang Z.-H. [1 ]
Wang X.-J. [1 ]
Cai H.-Y. [1 ]
机构：
[1] Key Lab. of Opto-electronics Information Technology(Tianjin University) of the Ministry of Education, College of Precision Instrument and Opto-electroinics Engineering, University of Tianjin
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2011年 / 19卷 / 04期
关键词：
Curve fitting; Dynamic speckle; Hysteresis curve; Piezoelectric ceramic; Speckle correlation;
D O I：
10.3788/OPE.20111904.0844
中图分类号：
学科分类号：
摘要：
Dynamic speckle correlation method was presented to measure the piezoelectric ceramic characteristic curves and scale linear intervals in this paper. Firstly, the speckle intensity cross-correlation of a projection phase diffuser in the micro-system was calculated, and influences of the resolution and magnification of the micro-system on object displacement measuring were also discussed. During the calculation of cross-correlation, a progressive correlation method was used to avoid the de-correlation caused by the object surface. A sampling system for micro speckles was designed and the hysteresis curve of displacement induced by a piezoelectric ceramic was measured. Experimental results indicate that the theory precision of the measuring system is 0.082 μm when a micro objective is with magnification of 100 and NA of 1.25. In consideration of the diffraction limit, the theory precision of the measuring system is 0.348 μm. It concludes that the method satisfies the requirements of measuring and scaling of linear intervals. Comparing with other methods, the dynamic speckle correlation can improve the calculation speed and measuring precision.
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页码：844 / 849
页数：5
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