Stress-induced anisotropy of graphitelike amorphous carbon

被引：0

作者：

Zollner, Stefan ^{[1
]}

Qin, Wentao ^{[1
]}

Gregory, Richard B. ^{[1
]}

Edwards, N.V. ^{[1
]}

Junker, Kurt ^{[1
]}

Tiwald, Thomas E. ^{[2
]}

机构：

[1] Freescale Semiconductor, Inc., MD K10, 3501 Ed Bluestein Boulevard, Austin, TX 78721

[2] J.A. Woollam Co., 645 M Street, Lincoln, NE 68508, United States

来源：

Journal of Applied Physics | 2007年 / 101卷 / 05期

关键词：

Ellipsometry spectra of graphitelike amorphous carbon films on Si reveal a strong anisotropy of the optical constants in the 0.7-9.5 eV photon-energy range. The films are optically uniaxial; with the optical axis oriented normal to the surface. This birefringence can be explained by ordering of the hexagonal graphene planes perpendicular to the substrate due to tensile stress; which was confirmed by transmission electron microscopy. All films show two peaks in the optical absorption; corresponding to the ordinary and extraordinary absorption peaks in graphite. © 2007 American Institute of Physics;

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摘要：

Journal article (JA)

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