Monolithic integration fabrication process of thermoelectric and vibrational devices for microelectromechanical system power generator

被引：0
|
作者：
Sato, Norio [1 ]
Kuwabara, Kei [1 ]
Ono, Kazuyoshi [1 ]
Sakata, Tomomi [1 ]
Morimura, Hiroki [1 ]
Terada, Jun [1 ]
Kudou, Kazuhisa [2 ]
Kamei, Toshikazu [2 ]
Yano, Masaki [2 ]
Machida, Katsuyuki [2 ]
Ishii, Hiromu [1 ]
机构：
[1] NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
[2] NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 9 A期
关键词：
Monolithic integrated circuits;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：6062 / 6067
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