Monolithic integration fabrication process of thermoelectric and vibrational devices for microelectromechanical system power generator

被引：0

作者：

Sato, Norio ^{[1
]}

Kuwabara, Kei ^{[1
]}

Ono, Kazuyoshi ^{[1
]}

Sakata, Tomomi ^{[1
]}

Morimura, Hiroki ^{[1
]}

Terada, Jun ^{[1
]}

Kudou, Kazuhisa ^{[2
]}

Kamei, Toshikazu ^{[2
]}

Yano, Masaki ^{[2
]}

Machida, Katsuyuki ^{[2
]}

Ishii, Hiromu ^{[1
]}

机构：

[1] NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan

[2] NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 9 A期

关键词：

Monolithic integrated circuits;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：6062 / 6067

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