Influence of substrate temperature on the properties of ZnO thin films grown by MOCVD technique

被引：0

作者：

Sun, Xiao-Hu ^{[1
]}

Lei, Qing-Song ^{[1
]}

Zeng, Xiang-Bin ^{[1
]}

Xue, Jun-Ming ^{[2
]}

Ju, Hong-Chao ^{[2
]}

Chen, Yang-Yang ^{[1
]}

机构：

[1] Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China

[2] Hisun PV TECH, Hengshui 053000, China

来源：

Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2012年 / 41卷 / 06期

关键词：

Organic chemicals - Organometallics - Thin films - Metallic films - Optical films - II-VI semiconductors - Solar cells - Zinc oxide - Optical properties;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Microstructural, electrical and optical properties of updoped-ZnO films grown by metal organic chemical vapor deposition at different substrate temperature were investigated. The results indicated that the substrate temperature plays an very important role on the properties of ZnO films. Textured ZnO thin film with a low resistivity(2.17×10-2 Ω &middot cm) and a high average transparency(>85%) was obtained at the temperature of 180°C. By further optimizing the structure and B-doped ZnO film as front electrode will be applied in solar cell soon.

引用

页码：1494 / 1497