Measurement for silane density in silane-hydrogen gas mixtures using a quartz sensor

被引：1

作者：

Suzuki A. ^{[1
]}

Karasawa M. ^{[2
]}

Nagai T. ^{[2
]}

Nonaka H. ^{[1
]}

Kondo M. ^{[2
]}

机构：

[1] Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, Tsukuba 305-8568

[2] Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, Tsukuba 305-8568

来源：

Journal of the Vacuum Society of Japan | 2010年 / 53卷 / 03期

关键词：

Silicon solar cells - Solar power generation - Gas mixtures;

D O I：

10.3131/jvsj2.53.162

中图分类号：

学科分类号：

摘要：

Densities of silane and hydrogen gas mixtures used for the production of thin silicon solar cell were measured using a quartz sensor, which output depends on viscosity and molecular weight of gas measured. The measurement for the silane-hydrogen gas mixtures revealed that the quartz sensor output depends on the silane and hydrogen densitites, can derive each density in the mixtures. From the results of the measurement, working curves were dereived for the pressure of 133-1333.0 Pa for the industrial production at room temperature. Resolusions of the density measured are 0.03 vol.% at total pressure of 1333.0 Pa, and are comparable to the results by a quartz pressure gauge previously reported. Finally, it was shown that the silane density ratio does not agree with the silane flow ratio, indicating that in-situ silane density measurement is important to control silane density.

引用

页码：162 / 164

页数：2