Effect of air squeeze film damping in multi-mode atomic force microscopy

被引：0
|
作者：
Zhao Y. [1 ]
Huang Q. [2 ]
机构：
[1] School of Electronic and Information Engineering, Anhui Jianzhu University, Hefei
[2] School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2022年 / 30卷 / 19期
关键词：
atomic force microscopy; higher-order resonant; quality factor; squeeze film damping;
D O I：
10.37188/OPE.20223019.2362
中图分类号：
学科分类号：
摘要：
When tapping mode atomic force microscopy （AFM） is operated in air， the distance between the cantilever and the sample is so small that cantilever oscillation induces squeeze film air damping in the gap. This study aims to model and analyze the effects of squeeze film damping by using the Euler-Bernoulli and Reynolds equations. Theoretical analysis shows that squeeze film damping can decrease the damping coefficient depending on the distance between the cantilever and the sample and the cantilever width. Then， resonant amplitude and quality factor （Q） of the cantilever in multi-mode AFM are tested. Experimental results show that the Q of the fundamental resonant cantilever decreases obviously. The amplitudes of two cantilevers with widths of 20-2 μm decrease by 7.8% and 20.6%. Squeeze film damping can affect the cantilever with a large width to a greater extent than the cantilever with a small width. This phenomenon can also influence AFM dynamic characteristics； in particular， it can decrease flexural sensitivity and scanning speed. However， this phenomenon can only slightly affect the Q and amplitude of the cantilever. The impact of squeeze film damping of the cantilever is significantly reduced when AFM is operated in a higher-order resonant mode. © 2022 Guangxue Jingmi Gongcheng/Optics and Precision Engineering. All rights reserved.
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页码：2362 / 2369
页数：7
相关论文
共 16 条
  • [1] HEATH G R, KOTS E, ROBERTSON J L, Et al., Localization atomic force microscopy［J］, Nature, 594, 7863, pp. 385-390, (2021)
  • [2] SADEGH HASSANI S, DARAEE M, SOBAT Z, Application of atomic force microscopy in adhesion force measurements［J］, Journal of Adhesion Science and Technology, 35, 3, pp. 221-241, (2021)
  • [3] YAN Y D, HE Y, GENG Y Q, Characterization study on machining PMMA thin-film using AFM tip-based dynamic plowing lithography［J］, Scanning, 38, 6, pp. 612-618, (2016)
  • [4] CHEN D X, YIN B H, LIN Y SH, Feed-forward and feed-back controller for large-range and high-speed AFM［J］, Opt. Precision Eng, 19, 4, pp. 836-843, (2011)
  • [5] WASTL D S, WEYMOUTH A J, GIESSIBL F J, Atomically resolved graphitic surfaces in air by atomic force microscopy［J］, ACS Nano, 8, 5, pp. 5233-5239, (2014)
  • [6] WU J J, LIU J, WEI J S, Development of double probe composite micro-and nano measuring instrument［J］, Opt. Precision Eng, 28, 2, pp. 415-423, (2020)
  • [7] BALANTEKIN M, High-speed dynamic atomic force microscopy by using a Q-controlled cantilever eigenmode as an actuator［J］, Ultramicroscopy, 149, pp. 45-50, (2015)
  • [8] CASTRO GARCIA R, Amplitude Modulation atomic Force Microscopy, (2010)
  • [9] HOUMMADY M, FARNAULT E, Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever［J］, Applied Physics A, 66, 1, pp. S361-S364, (1998)
  • [10] GUNTHER P, FISCHER U C, DRANSFELD K, Scanning near-field acoustic microscopy［J］, Applied Physics B, 48, 1, pp. 89-92, (1989)
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