Three-dimension photonic crystals fabrication using SU-8 photoresist

被引：0
|
作者：
Zhang, Xiao-Yu [1 ]
Gao, Hong-Tao [1 ]
Zhou, Chong-Xi [1 ]
Liu, Qiang [1 ]
Xing, Ting-Wen [1 ]
Yao, Han-Min [1 ]
机构：
[1] State Key Laboratory of Optical Technologies for Microfabrication, the Institute of Optics and Electronics, the Chinese Academy of Sciences, Chengdu 610209, China
来源：
Guangdian Gongcheng/Opto-Electronic Engineering | 2007年 / 34卷 / 08期
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页码：28 / 31
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