Photoconductive characteristics of hydro-oxygenated amorphous titanium oxide films prepared by remote plasma-enhanced chemical vapor deposition

被引：0
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作者：
Sakaguchi, Koichi [1 ]
Shimakawa, Koichi [2 ]
Hatanaka, Yoshinori [1 ]
机构：
[1] Faculty of Engineering, Aichi University of Technology, 50-2 Manori Nishihazama, Gamagori, Aichi 443-0047, Japan
[2] Department of Electrical and Electronic Engineering, Gifu University, Gifu 501-1193, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 5 A期
关键词：
The photoconductive characteristics of amorphous titanium oxide films (a-TiOx:OH) prepared by remote plasma-enhanced (RPE) chemical vapor deposition; in inert Ar atmosphere with/without a small amount of oxygen; have been studied. In inert Ar atmosphere without oxygen; the residual decay of photocurrent (long decay time) is observed after removing UV irradiation. On the other hand; in inert Ar atmosphere with a small amount of oxygen; the photocurrent under UV irradiation is influenced strongly by an environmental gas with oxygen gas. The maximum of photocurrent (photosensitivity) is nearly inversely proportional to oxygen partial pressure; suggesting that the present films are useful for sensors of environmental oxygen gases. The decay of photocurrent; after removing UV irradiation; follows a stretched exponential function. The effective decay time τ is nearly inversely proportional to oxygen partial pressure. The results will be discussed in terms of the surface reaction of oxygen gas on the present films. © 2006 The Japan Society of Applied Physics;
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页码：4183 / 4186
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