Metal-containing plasma source based on atmospheric pressure glow discharge

被引：0
作者：
Savkin K.P. [1 ]
Sorokin D.A. [1 ]
Beloplotov D.V. [1 ]
Shandrikov M.V. [1 ]
Kazakov A.V. [1 ,2 ]
机构：
[1] Institute of High Current Electronics SB RAS, 2/3 Akademicheskii Ave., Tomsk
[2] Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk
来源：
Applied Physics | 2022年 / 06期
关键词：
atmospheric pressure; coatings; low-temperature plasma; metal atoms; metal ions; optical spectroscopy; ultrafine powders;
D O I：
10.51368/1996-0948-2022-6-12-17
中图分类号：
学科分类号：
摘要：
Upgraded plasma source based on atmospheric pressure glow discharge and features of it's operation are presented. The main purpose of upgraded device is generation of metal-contained plasma flows. A brief review of the state-of-the-art methods for generating metal-containing plasma at atmospheric pressure is given. The possibilities of application of the described discharge system in research on the production of ultrafine powders and functional coatings are indicated. © 2022 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.
引用
收藏
页码：12 / 17
页数：5
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