Metal-containing plasma source based on atmospheric pressure glow discharge

被引：0

作者：

Savkin K.P. ^{[1
]}

Sorokin D.A. ^{[1
]}

Beloplotov D.V. ^{[1
]}

Shandrikov M.V. ^{[1
]}

Kazakov A.V. ^{[1
,2
]}

机构：

[1] Institute of High Current Electronics SB RAS, 2/3 Akademicheskii Ave., Tomsk

[2] Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk

来源：

Applied Physics | 2022年 / 06期

关键词：

atmospheric pressure; coatings; low-temperature plasma; metal atoms; metal ions; optical spectroscopy; ultrafine powders;

D O I：

10.51368/1996-0948-2022-6-12-17

中图分类号：

学科分类号：

摘要：

Upgraded plasma source based on atmospheric pressure glow discharge and features of it's operation are presented. The main purpose of upgraded device is generation of metal-contained plasma flows. A brief review of the state-of-the-art methods for generating metal-containing plasma at atmospheric pressure is given. The possibilities of application of the described discharge system in research on the production of ultrafine powders and functional coatings are indicated. © 2022 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.

引用

页码：12 / 17

页数：5

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