A dynamic macromodel for distributed parameter magnetic microactuators

被引：5

作者：

Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing 210096, China ^{[1
]}

不详 ^{[2
]}

机构：

[1] Key Laboratory of MEMS, Ministry of Education, Southeast University

[2] Department of Optoelectrical Engineering, Nanjing University of Posts and Telecommunications

来源：

Chin. Phys. | 2008年 / 5卷 / 1709-1715期

关键词：

Macromodel; Magnetic microactuator; Microelectromechanical systems (MEMS);

D O I：

10.1088/1674-1056/17/5/029

中图分类号：

学科分类号：

摘要：

This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions. © 2008 Chin. Phys. Soc. and IOP Publishing Ltd.

引用

页码：1709 / 1715

页数：6

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