RF magnetron sputtered Cu2ZnSnS4 coatings and its microstructures and optical properties

被引：0

作者：

Yang, Haigang ^{[1
,3
]}

Zhang, Jidong ^{[1
]}

Hao, Ruiting ^{[2
]}

Cao, Weiwei ^{[1
]}

Li, Meicheng ^{[3
]}

Chang, Fanggao ^{[1
]}

机构：

[1] College of Physics and Electronic Engineering, Henan Key Laboratory of Photovoltaic Materials, Henan Normal University, Xinxiang

[2] Institute of Solar Energy, Yunnan Normal University, Kunming

[3] Renewable Energy School, North China Electric Power University, Beijing

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2014年 / 34卷 / 09期

关键词：

Band gap; Crystal structure; Cu[!sub]2[!/sub]ZnSnS[!sub]4[!/sub] thin film; Magnetron sputtering; Substrate temperature;

D O I：

10.13922/j.cnki.cjovst.2014.09.21

中图分类号：

学科分类号：

摘要：

The Cu2ZnSnS4(CZTS) coatings were fabricated on substrate of soda-lime glass directly by RF magnetron sputtering of Cu2ZnSnS4 target without sulfurization. The effects of the sputtering conditions, including but not limited to the substrate temperature, pressure, and deposition rate, on the growth of the CZTS coating were investigated to optimize its growth conditions. The phase-structures, microstructures, and optical properties were characterized with scanning electron microscope, X-ray diffraction, energy dispersive X-ray spectroscopy, and UV-VIS-NIR spectrophotometer. The results show that deposited at a substrate temperature of 500℃, the optimal kesterite-phased CZTS coatings, with an average grain size of 23 nm, have an optical band gap of around 1.49 eV and an absorption coefficient of the order of 104 cm-1in the visible range. ©, 2014, Science Press. All right reserved.

引用

页码：991 / 996

页数：5

共 21 条

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