Electro-optic tuning in ferroelectric capacitor with photonic crystal nanobeam cavity

<正>Silicon photonics has provided a platform for the convergency of photonic devices and electronic circuits, facilitating the development of optical telecommunications and optical interconnects on chip [1]. As the basic building block of optical communication systems, electro-optic tuning is expected to be more compact, high bandwidth, energy efficient, and allow for CMOS-compatible fabrication in the future [2]. Resonator-based electro-optic tuning has attracted more and more interest due to the small footprint, enhanced light-matter interactions and high energy efficiency. Compared with microring and microdisk resonators, photonic crystal nanobeam cavities(PCNBCs) realize higher quality factors, stronger light-matter interactions, ultrasmall mode volume and a much larger free spectral range(FSR) [3].