Piezo dynamic force measurement in semiconductor manufacturing

被引：0
|
作者：
Hillinger, Robert [1 ]
机构：
[1] Kistler Group, Switzerland
来源：
Electronics World | / 127卷 / 2010期
关键词：
Smart manufacturing;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The advance of 5G, IoT and Big Data, as well as new technology introductions, places greater demands on semiconductors. As application requirements become more complex, so does the need for better-performing semiconductors, which in turn makes their production more challenging.
引用
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页码：24 / 25
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