Effects of atomic layer etching on magnetic properties of CoFeB films: Reduction of Gilbert damping

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作者
Konh, Mahsa [1 ]
Wang, Yang [2 ]
Pina, Marissa [1 ]
Teplyakov, Andrew V. [1 ]
Xiao, John Q. [2 ]
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[1] Department of Chemistry and Biochemistry, University of Delaware, Newark,DE,19716, United States
[2] Department of Physics and Astronomy, University of Delaware, Newark,DE,19716, United States
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