Zn Doping Effect on Surface Morphology of Metamorphic InAs on GaAs Grown by MOVPE

被引：0
|
作者：
Nakagawa, Shota [1 ]
Imamura, Yuki [1 ]
Hirata, Yasushi [1 ]
Maeda, Koji [1 ]
Arai, Masakazu [1 ]
机构：
[1] University Of Miyazaki, Faculty Of Engineering, Miyazaki,889-2192, Japan
来源：
26th Microoptics Conference, MOC 2021 | 2021年
关键词：
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摘要：
Surface roughness
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