Design and Fabrication of a Pillar-Based Piezoelectric Microphone Exploiting 3D-Printing Technology

被引：0

作者：

Ricci Y. ^{[1
]}

Sorrentino A. ^{[1
]}

La Torraca P. ^{[1
]}

Cattani L. ^{[3
]}

Cotogno M. ^{[1
]}

Cantarella G. ^{[2
]}

Orazi L. ^{[1
]}

Castagnetti D. ^{[1
]}

Lugli P. ^{[2
]}

Larcher L. ^{[1
,4
]}

机构：

[1] Department of Sciences and Methods for Engineering, University of Modena and Reggio Emilia, Reggio Emilia

[2] Faculty of Science and Technology, Free University of Bozen-Bolzano, Bolzano

[3] Ask Industries Spa, Reggio Emilia

[4] Applied Materials-MDLx Italy RandD, Reggio Emilia

来源：

IEEE Sensors Letters | 2021年 / 5卷 / 02期

关键词：

3D printing; additive manufacturing; Mechanical sensors; piezoelectric microphone; polyvinylidene fluoride (PVDF); sensor;

D O I：

10.1109/LSENS.2021.3053209

中图分类号：

学科分类号：

摘要：

This letter presents a 3-D-printed piezoelectric microphone with enhanced voltage sensitivity. The sensitivity is improved by a combination of a single-pillar mechanical design and a specific polyvinylidene fluoride (PVDF)-film electrode patterning. The moving part of the mechanical structure and the chassis are 3D-printed as a single unit and trimmed by laser cutting, allowing for a simple fabrication of the device. The measured sensitivity of 1 mV/Pa (±6 dB) in the bandwidth 500-2500 Hz agrees with simulations, showing an improvement over similar pillar-based piezoelectric sensor solutions. The sensitivity performance is shown to be comparable to existing microphones with different technologies. The microphone is also characterized by excellent linearity within the measurable range. 3D-printing technique can thus be adopted for the manufacturing of low cost and highly customizable microphone sensors. © 2017 IEEE.

引用

共 27 条

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