Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

被引：0

作者：

Hu, Youwang ^{[1
]}

Wang, Yalong ^{[1
]}

Dong, Xianshan ^{[2
]}

Xi, Xiang ^{[3
]}

Long, Chao ^{[1
]}

Zheng, Haoning ^{[1
]}

Wang, Yao ^{[1
]}

Sun, Xiaoyan ^{[1
]}

Duan, Ji'an ^{[1
]}

机构：

[1] State Key Laboratory of High-Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha,410083, China

[2] Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, Guangzhou,510610, China

[3] College of Intelligence Science, National University of Defense Technology, Changsha,410073, China

来源：

Optik | 2022年 / 269卷

关键词：

Fused silica;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用