Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

被引：0
作者：
Hu, Youwang [1 ]
Wang, Yalong [1 ]
Dong, Xianshan [2 ]
Xi, Xiang [3 ]
Long, Chao [1 ]
Zheng, Haoning [1 ]
Wang, Yao [1 ]
Sun, Xiaoyan [1 ]
Duan, Ji'an [1 ]
机构：
[1] State Key Laboratory of High-Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha,410083, China
[2] Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, Guangzhou,510610, China
[3] College of Intelligence Science, National University of Defense Technology, Changsha,410073, China
来源：
Optik | 2022年 / 269卷
关键词：
Fused silica;
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