Vector Magnetic Current Imaging of an 8 nm Process Node Chip and 3D Current Distributions Using the Quantum Diamond Microscope

被引：0

作者：

Oliver, Sean M. ^{[1
,2
]}

Martynowych, Dmitro J. ^{[1
]}

Turner, Matthew J. ^{[2
,3
,4
]}

Hopper, David A. ^{[1
]}

Walsworth, Ronald L. ^{[2
,3
,4
]}

Levine, Edlyn V. ^{[1
,2
,5
]}

机构：

[1] The MITRE Corporation, McLean,VA,22102, United States

[2] Quantum Technology Center, University of Maryland, College Park,MD,20742, United States

[3] Department of Electrical and Computer Engineering, University of Maryland, College Park,MD,20742, United States

[4] Department of Physics, University of Maryland, College Park,MD,20742, United States

[5] Department of Physics, Harvard University, Cambridge,MA,02138, United States

来源：

arXiv | 2022年

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D O I：

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摘要：

Diamonds - Failure analysis - Flip chip devices - Heat flux - Magnetic fields - Maxwell equations - Microelectronics - Three dimensional integrated circuits

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