Vector Magnetic Current Imaging of an 8 nm Process Node Chip and 3D Current Distributions Using the Quantum Diamond Microscope

被引：0
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作者：
Oliver, Sean M. [1 ,2 ]
Martynowych, Dmitro J. [1 ]
Turner, Matthew J. [2 ,3 ,4 ]
Hopper, David A. [1 ]
Walsworth, Ronald L. [2 ,3 ,4 ]
Levine, Edlyn V. [1 ,2 ,5 ]
机构：
[1] The MITRE Corporation, McLean,VA,22102, United States
[2] Quantum Technology Center, University of Maryland, College Park,MD,20742, United States
[3] Department of Electrical and Computer Engineering, University of Maryland, College Park,MD,20742, United States
[4] Department of Physics, University of Maryland, College Park,MD,20742, United States
[5] Department of Physics, Harvard University, Cambridge,MA,02138, United States
来源：
arXiv | 2022年
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
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学科分类号：
摘要：
Diamonds - Failure analysis - Flip chip devices - Heat flux - Magnetic fields - Maxwell equations - Microelectronics - Three dimensional integrated circuits
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