Photonic chip sensing test system based on grating coupling techniques

被引：0

作者：

Liu, Xingyu ^{[1
,2
]}

Guo, Rongxiang ^{[1
,2
]}

Lang, Qiyue ^{[1
,2
]}

Liu, Tiegen ^{[1
,2
]}

Cheng, Zhenzhou ^{[1
,2
]}

机构：

[1] School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin

[2] Key Laboratory of Optoelectronics Information Technology, Ministry of Education, Tianjin

来源：

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2024年 / 45卷 / 07期

关键词：

environmental monitoring; grating coupler techniques; optical sensing chip; silicon photonics;

D O I：

10.19650/j.cnki.cjsi.J2412493

中图分类号：

学科分类号：

摘要：

Advanced photonic chip testing systems have attracted significant attention to date. However, existing photonic chip testing systems are primarily developed for communication chips and lack environmental parameter control functions, making them insufficient for the development needs of sensing chips. In this study, we present a photonic chip sensing test system based on grating coupling techniques. The system consists of automatic grating coupling, environment control and perception, as well as data processing and interaction. Using this system, we demonstrated gas concentration sensing and temperature sensing by using a silicon micro-ring resonator. Experimental results show that under standard temperature and pressure conditions, the system can detect CO2 gas concentrations ranging from 20% to 80%, with a sensitivity of 0. 152 GHz / % (2. 113 pm / %) . Moreover, the temperature sensing can be achieved in a range of 30℃ to 35℃ with a sensitivity of 4. 996 GHz / ℃ (74. 891 pm / ℃) . This work provides a rapid and efficient approach for the development of optical sensor chips. © 2024 Science Press. All rights reserved.

引用

页码：156 / 164

页数：8

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