Design, analysis and experimental characterization of MEMS based one hot-arm electrothermal actuator

被引：0

作者：

Javaid, Faraz ^{[1
]}

Bashir, Uzair ^{[2
]}

Saleem, Muhammad Mubasher ^{[1
,3
]}

Arshad, Adeel ^{[4
]}

Tiwana, Mohsin Islam ^{[1
,3
]}

Ali, Osama ^{[1
,3
]}

机构：

[1] Natl Univ Sci & Technol, Dept Mechatron Engn, Islamabad, Pakistan

[2] Sir Syed CASE Inst Technol, Dept Elect & Comp Engn, Islamabad, Pakistan

[3] Natl Ctr Robot & Automation NCRA, Islamabad, Pakistan

[4] Superior Univ, Fac Engn & Technol, Lahore, Pakistan

来源：

ENGINEERING RESEARCH EXPRESS | 2024年 / 6卷 / 04期

关键词：

MEMS; SOIMUMPs; FEA; electrothermal actuator; FAILURE;

D O I：

10.1088/2631-8695/ad7f27

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The focus of this study is to analyse the temperature, stress, and mechanical displacement distribution of a U-shaped one hot-arm Microelectromechanical System (MEMS) based electrothermal actuator using CoventorWare software. The actuator was fabricated using the commercially available SOIMUMPs process from Science. The Finite Element Method (FEM) simulation results were verified through the experimental characterization of fabricated structure at different actuation voltages and are found to be in good agreement. Furthermore, peak value of actuation voltage is measured before the failure of the electrothermal structure occurs.

引用

页数：15

共 50 条

[11] Design and Simulation of MEMS Electrothermal Compliant Actuator-Based Analog-to-Digital Converter
Pandiyan, P.
Uma, G.
Umapathy, M.
ARABIAN JOURNAL FOR SCIENCE AND ENGINEERING, 2019, 44 (03) : 1823 - 1831
[12] Design and Simulation of MEMS Electrothermal Compliant Actuator-Based Analog-to-Digital Converter
P. Pandiyan
G. Uma
M. Umapathy
Arabian Journal for Science and Engineering, 2019, 44 : 1823 - 1831
[13] Design Of A Novel Electrothermal Actuator for Integrated MEMS Safety-and-Arming Devices
Li, Xiuyuan
Zhao, Yulong
Hu, Tengjiang
2015 IEEE 10TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2015, : 63 - 66
[14] Design and performance of a double hot arm polysilicon thermal actuator
Burns, DM
Bright, VM
MICROMACHINED DEVICES AND COMPONENTS III, 1997, 3224 : 296 - 306
[15] Safety and Arming Device With MEMS Based Encryption System Driven by Electrothermal Actuator
Fang, Kuang
Hu, TengJiang
Jiang, XiaoHua
Zhao, YuLong
2020 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP), 2020,
[16] Design and Electrothermal analysis of MEMS based Microheater Array for Gas Sensor using INVAR alloy
Mondal, S. S.
Roy, S.
Sarkar, C. K.
PROCEEDINGS OF THE 2012 INTERNATIONAL CONFERENCE ON COMMUNICATIONS, DEVICES AND INTELLIGENT SYSTEMS (CODLS), 2012, : 468 - 471
[17] Characterization and Reliability Study of a MEMS Mirror Based on Electrothermal Bimorph Actuation
Wang, Haoran
Zhang, Xiaoyang
Zhang, Daihua
Zhou, Liang
Xie, Huikai
2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2017, : 141 - 142
[18] Design of Efficient MEMS based Actuator for Drug Delivery Applications
Khare, Vandita
Singh, Agnimitra
2014 INTERNATIONAL CONFERENCE FOR CONVERGENCE OF TECHNOLOGY (I2CT), 2014,
[19] Experimental and Numerical Analysis of MEMS Electrothermal Actuators with Cascaded V-shaped Mechanisms
Sciberras, Thomas
Mollicone, Pierluigi
Demicoli, Marija
Grech, Ivan
Sammut, Nicholas
Mallia, Bertram
2022 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP, 2022,
[20] Design and experimental analysis of MEMS-based Ku band phase shifter
Rajan, Prithivi, V
Punitha, A.
CIRCUIT WORLD, 2018, 44 (03) : 115 - 124

← 1 2 3 4 5 →