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机构:
Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing,100029, China
University of Chinese Academy of Sciences, Beijing,100049, China
Peng Cheng Laboratory, Shenzhen,518038, China Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing,100029, China