Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

被引：0

作者：

Cheng, Zhenying ^{[1
]}

Xu, Dongjian ^{[1
]}

Zhang, Chengyao ^{[1
]}

Liu, Yunlong ^{[1
]}

Li, Ruijun ^{[1
]}

机构：

[1] Anhui Provincial Key Laboratory of Measurement Theory and Precision Instruments, School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,230009, China

来源：

Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2024年 / 32卷 / 17期

关键词：

Probes;

D O I：

10.37188/OPE.20243217.2698

中图分类号：

学科分类号：

摘要：

引用

页码：2698 / 2707