Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

被引：0
|
作者：
Cheng, Zhenying [1 ]
Xu, Dongjian [1 ]
Zhang, Chengyao [1 ]
Liu, Yunlong [1 ]
Li, Ruijun [1 ]
机构：
[1] Anhui Provincial Key Laboratory of Measurement Theory and Precision Instruments, School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,230009, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2024年 / 32卷 / 17期
关键词：
Probes;
D O I：
10.37188/OPE.20243217.2698
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2698 / 2707
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