Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and γ-radiolysis

被引：0
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作者：
Takata, Yui [1 ]
Muroya, Yusa [1 ]
Kozawa, Takahiro [1 ]
Machida, Kohei [2 ]
Enomoto, Satoshi [2 ]
Naqvi, Bilal [3 ]
De Simone, Danilo [3 ]
机构：
[1] SANKEN, Osaka University, Ibaraki, Osaka,567-0047, Japan
[2] Toyo Gosei Co., Daito, Tokyo,111-0053, Japan
[3] IMEC, Kapeldreef 75, Leuven,3001, Belgium
来源：
Japanese Journal of Applied Physics | 2023年 / 62卷 / 07期
关键词：
Compendex;
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摘要：
Radiolysis
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