A novel measurement method for the torque acting on the upper platen in a three-way double-sided lapping/polishing machine

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作者
Hashimoto, Yohei [1 ]
Ozaki, Ryo [2 ]
Furumoto, Tatsuaki [1 ]
Hosokawa, Akira [1 ]
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[1] Institute of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa,Ishikawa,920-1192, Japan
[2] Graduate School of Natural Science & Technology, Kanazawa University, Kakuma-machi, Kanazawa,Ishikawa,920-1192, Japan
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页码:891 / 898
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  • [1] A novel measurement method for the torque acting on the upper platen in a three-way double-sided lapping/polishing machine
    Hashimoto, Yohei
    Ozaki, Ryo
    Furumoto, Tatsuaki
    Hosokawa, Akira
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021, 72 : 891 - 898
  • [2] Broadband Three-Way LC-Ladder Divider on a Double-Sided PCB
    Kawai, Tadashi
    Okada, Yosuke
    Enokihara, Akira
    2018 IEEE INTERNATIONAL SYMPOSIUM ON RADIO-FREQUENCY INTEGRATION TECHNOLOGY (RFIT), 2018, : 49 - 51