Hyperspectral X-Ray Imaging For Nanometrology

被引：0
|
作者：
Safonov, A. I. [1 ]
Nikolaev, K. V. [1 ,2 ]
Yakunin, S. N. [1 ]
机构：
[1] Kurchatov Inst, Natl Res Ctr, Moscow 123182, Russia
[2] State Univ, Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Oblast, Russia
来源：
CRYSTALLOGRAPHY REPORTS | 2024年 / 69卷 / 04期
基金：
俄罗斯基础研究基金会;
关键词：
CHARGE; PTYCHOGRAPHY; EFFICIENCY; DETECTORS;
D O I：
10.1134/S1063774524601400
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formation of artifacts in energy spectra, and count efficiency are analyzed. An algorithm for obtaining subpixel resolution with application of singular value decomposition is proposed. The algorithm operation has been tested on synthesized experimental data and in a live experiment with registration of the spatial and energy structure of X-ray fluorescence emission from a layered system. The application potential of hyperspectral imaging for the experimental method of X-ray standing waves in the geometry of normal incidence and grazing X-ray fluorescence emission is demonstrated.
引用
收藏
页码：609 / 619
页数：11
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