共 6 条
Spontaneous asymmetry effect induced by uniform magnetic fields in capacitively coupled plasmas under perfectly symmetric conditions
被引:0
作者:
Yao, Jianxiong
[1
]
Liu, Chenxi
[1
]
He, Feng
[1
]
Miao, Jinsong
[1
]
Ouyang, Jiting
[1
]
Zheng, Bocong
[1
]
机构:
[1] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
基金:
中国国家自然科学基金;
关键词:
capacitively coupled plasmas;
asymmetry effect;
traverse magnetic field;
electron kinetics;
PIC/MCC simulation;
MODE TRANSITION;
DISCHARGE;
ELECTRON;
D O I:
10.1088/1361-6595/ad80c5
中图分类号:
O35 [流体力学];
O53 [等离子体物理学];
学科分类号:
070204 ;
080103 ;
080704 ;
摘要:
Introducing asymmetry in capacitively coupled plasmas (CCPs) is a common strategy for achieving independent control of ion mean energy and flux. Our 1d3v particle-in-cell/Monte Carlo collision simulations reveal that a uniform magnetic field within a specific range can induce spatial asymmetry in low-pressure CCPs, even under perfectly symmetric conditions. This asymmetry, characterized by a shift in the plasma density distribution and significant differences in electron kinetics between the two sides of the plasma, leads to strong ionization and most electron losses on the low-density side, while the high-density side experiences weak ionization and minimal electron losses. The underlying mechanism triggering this spontaneous asymmetry is the differential influence of the magnetic field on low-energy (local) and high-energy (relatively nonlocal) electrons. Under conditions of low pressure and an appropriate magnetic field, this disparity in electron kinetic behavior leads to a spontaneous amplification of the asymmetry induced by random fluctuations until a steady state is reached, culminating in a spontaneous asymmetric effect.
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页数:14
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