Spontaneous asymmetry effect induced by uniform magnetic fields in capacitively coupled plasmas under perfectly symmetric conditions

被引:0
作者
Yao, Jianxiong [1 ]
Liu, Chenxi [1 ]
He, Feng [1 ]
Miao, Jinsong [1 ]
Ouyang, Jiting [1 ]
Zheng, Bocong [1 ]
机构
[1] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
基金
中国国家自然科学基金;
关键词
capacitively coupled plasmas; asymmetry effect; traverse magnetic field; electron kinetics; PIC/MCC simulation; MODE TRANSITION; DISCHARGE; ELECTRON;
D O I
10.1088/1361-6595/ad80c5
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Introducing asymmetry in capacitively coupled plasmas (CCPs) is a common strategy for achieving independent control of ion mean energy and flux. Our 1d3v particle-in-cell/Monte Carlo collision simulations reveal that a uniform magnetic field within a specific range can induce spatial asymmetry in low-pressure CCPs, even under perfectly symmetric conditions. This asymmetry, characterized by a shift in the plasma density distribution and significant differences in electron kinetics between the two sides of the plasma, leads to strong ionization and most electron losses on the low-density side, while the high-density side experiences weak ionization and minimal electron losses. The underlying mechanism triggering this spontaneous asymmetry is the differential influence of the magnetic field on low-energy (local) and high-energy (relatively nonlocal) electrons. Under conditions of low pressure and an appropriate magnetic field, this disparity in electron kinetic behavior leads to a spontaneous amplification of the asymmetry induced by random fluctuations until a steady state is reached, culminating in a spontaneous asymmetric effect.
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页数:14
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