A spurious-free SAW filter employing a novel transducer structure on bulk LiNbO3 substrates

In order to cope with the ubiquitous wireless connections and the rapid transmission of data in communication systems, surface acoustic wave filters are required to have high performance. With a large electromechanical coupling coefficient (K2), conventional bulk 64 degrees YX-LiNbO3 substrates are attractive for low-cost mass production of surface acoustic wave (SAW) resonators. However, the influence of the transverse modes restricts their practical application. In this work, a novel and simple tilted transducer is fabricated, and successfully achieved spurious-free passband SAW filters based on 64 degrees YX-LN piezoelectric substrates. In this work, the transverse modes suppression method is theoretically studied and designed, and the effectiveness of the energy concentrated structure is verified. The optimal tilt IDT angle for eliminating the influence of transverse modes in Al/64 degrees YX-LN structure is about 6 degrees. Subsequently, based on the above research, three types of tilted resonators were designed and fabricated, which not only verified the reliability of the aforementioned results but also enhanced the performance of the devices, compensating for the deficiency caused by the reduction of the Q factor due to the tilted structure. Finally, based on the double busbar tilted structure, a SAW filter was designed, which has a large 3 dB fractional bandwidth (FBW) and a spurious-free passband. The SAW filter designed in this work has low cost and excellent performance, and can be mass produced. In the field of low-cost RF devices, this work contributes to maintaining the competitive advantage of SAW technology.