Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industry

被引:0
|
作者
Lim, Keun-Young [1 ]
Jung, Seungho [1 ]
Kim, Sang-Ryung [2 ]
机构
[1] Ajou Univ, Dept Environm & Safety Engn, Suwon 16499, South Korea
[2] Korea Occupat Safety & Hlth Agcy, Incheon 44429, South Korea
关键词
exhaust ventilation; gas box; SEMI F-15; SEMI S6; KS C IEC 60079-10-1; IEC; 60079-10-1; NFPA; 318; tracer gas test; semiconductor manufacturing equipment;
D O I
10.3390/pr12112531
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Hazardous substances such as hydrogen and chlorine are used in semiconductor manufacturing. When these gasses are discharged, they are mixed with outside air and are connected to a treatment facility through a duct inside a gas box. This study investigated an optimal exhaust design to prevent fire explosions and toxic exposure by optimizing the exhaust volume when hazardous substances leak from the gas box of semiconductor manufacturing equipment. In this study, carbon monoxide was used for modeling. A 75 mm duct was used, and the tracer gas was released into the gas box at 15.4 LPM. The concentrations were measured at nine points inside and outside the gas box. According to the test results, in an experiment designed with 0% air intake, the internal leakage concentration was measured to be more than 25% of the LEL (lower explosive limit) for 10 min when leakage occurred due to stagnant flow, and the outside toxicity concentration was also measured to be more than 50% of the TWA (time-weighted average) value. When the air intake ratio was designed to be 100%, there was a point on the outside that exceeded 50% of the TWA, confirming that excessive air intake could also cause gas to leak outside. Finally, when the intake ratio was designed to be 50% in both directions, it was confirmed that the airflow was maintained smoothly, and the hazardous gasses were safely diluted and discharged through the duct. This study was conducted to improve the safety of workers in the field in the event of leakage of flammable and toxic gasses by testing the location and area of the air intake hole in the gas box exhaust port. Through this effort, the aim is to present specific standards for gas box design and to assist in establishing a legal framework or standardized guidelines.
引用
收藏
页数:22
相关论文
共 50 条
  • [1] Mathematical modelling of accidental gas releases
    Ctr. d'Estudis Risc Tecnologic [C., Dept. Chem. Eng., Univ. P., 08028 Barcelona, Catalonia, Spain
    J. Hazard. Mater., 2-3 (211-233):
  • [2] Mathematical modelling of accidental gas releases
    Montiel, H
    Vilchez, JA
    Casal, J
    Arnaldos, J
    JOURNAL OF HAZARDOUS MATERIALS, 1998, 59 (2-3) : 211 - 233
  • [3] Assessing and managing the risks of accidental releases of hazardous gas: A case study of natural gas wells contaminated with hydrogen sulfide
    Layton, D.W.
    Cederwell, R.T.
    Environment International, 1986, 12 (05) : 519 - 532
  • [4] Optimal Ventilation Design for Flammable Gas Leaking from Gas Box Used in Semiconductor Manufacturing: Case Study on Korean Semiconductor Industry
    Kim, Sang-Ryung
    Moon, Hyo-Shik
    Jeong, Phil-Hoon
    FIRE-SWITZERLAND, 2023, 6 (11):
  • [5] DESIGN OF A SYSTEM FOR REAL-TIME MODELING OF THE DISPERSION OF HAZARDOUS GAS RELEASES IN INDUSTRIAL-PLANTS .2. ACCIDENTAL RELEASES FROM STORAGE INSTALLATIONS
    ZIOMAS, IC
    ZEREFOS, CS
    BAIS, AF
    JOURNAL OF LOSS PREVENTION IN THE PROCESS INDUSTRIES, 1989, 2 (04) : 194 - 199
  • [6] HAZARDOUS GAS HANDLING IN SEMICONDUCTOR PROCESSING
    KUMAGAI, HY
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 2865 - 2873
  • [7] Uncertainties in modeling hazardous gas releases for emergency response
    Baumann-Stanzer, Kathrin
    Stenzel, Sirma
    METEOROLOGISCHE ZEITSCHRIFT, 2011, 20 (01) : 19 - 27
  • [8] Design of a computer tool for the evaluation of the consequences of accidental natural gas releases in distribution pipes
    Arnaldos, J
    Casal, J
    Montiel, H
    Sanchez-Carricondo, M
    Vilchez, JA
    JOURNAL OF LOSS PREVENTION IN THE PROCESS INDUSTRIES, 1998, 11 (02) : 135 - 148
  • [9] Design of a computer tool for the evaluation of the consequences of accidental natural gas releases in distribution pipes
    Ctr. d'Estudis Risc Tecnologic [C., Univ. Politecnica Catalunya-I., Catalonia, Spain
    J. Loss Prev. Process Ind., 2 (135-148):
  • [10] Exploration of exhaust gas of natural gas catalytic combustion in the aseptic box
    Yan, Longfei
    Xiao, Min
    Zhang, Shihong
    FRONTIERS OF MATERIALS, CHEMICAL AND METALLURGICAL TECHNOLOGIES, PTS 1 AND 2, 2012, 581-582 : 1172 - 1175