Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel

被引：0

作者：

Hariharan, R. ^{[1
]}

Raja, R. ^{[2
]}

Golden Renjith Nimal, R.J. ^{[3
]}

Refaai, Mohamad Reda A. ^{[4
]}

Ravi, S. ^{[5
]}

Allasi, Haiter Lenin ^{[6
]}

机构：

[1] Department of Mechanical Engineering, Bharath Institute of Higher Education and Research, Chennai-73, Tamilnadu, India

[2] VPMM Engineering College for Women, Srivilliputhur 626190, Tamilnadu, India

[3] Department of Mechanical Engineering, Jai Shriram Engineering College, Tirupur-638660, Tamilnadu, India

[4] Prince Sattam Bin Abdulaziz University, College of Engineering Department of Mechanical Engineering, Alkharj,16273, Saudi Arabia

[5] Centre for Materials Research, Chennai Institute of Technology, Chennai 600069, Tamilnadu, India

[6] Department of Mechanical Engineering, Wollo University Kombolcha Institute of Technology, Kombolcha, Ethiopia

来源：

Advances in Materials Science and Engineering | 2021年 / 2021卷

关键词：

4140 steel - Atomic-force-microscopy - Crystals structures - Flowrate ratio - Magnetron-sputtering - Multi-layer-coating - Nanocomposite multilayers - Physical vapour deposition - Single layer - Thin-films;

D O I：

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中图分类号：

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摘要：

In this present research work, TiZrN and TaZrN multilayer coating was deposited on 4140 steel by RF/DC magnetron sputtering for comparative work also prepared in single layer. The flow rate ratio of Ar/N2 was set to 15: 3 sccm and the thin film was prepared by the PVD (physical vapor deposition) method by RF/DC magnetron using a Ti-Zr and Ta-Zr target with a purity of 99.99%. The crystal structure, surface morphology microstructure, and component arrangements were explored by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscopy (AFM). It has been found that the crystal structure, surface morphology, microstructure, and elemental composition of the membrane are strongly dependent on deposition parameters. It is mechanically characterized by corrosion and Vickers hardness. In AFM measurements, coarse cluster particles with increasing Ti and Ta values not only increase the average roughness (Ra) by 2.341 nm (200°C) and 2.951 nm (400°C) but also have a continuous average thickness which was shown to increase by 1.504 nm and 781.75 nm. With the increase of hardness, the roughness decreases correspondingly. The TiZrN multilayer microhardness augmented to 314 GPa at 200°C and 371 GPa for TaZrN (400°C). © 2021 R. Hariharan et al.

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