High-Performance All-Solid-State on-Chip Planar Micro-Supercapacitors Based on Aminated Graphene Quantum Dots by Photolithography

Rapid development of portable miniaturized electronic devices has put forward higher requirements for microenergy. Functionalized graphene quantum dots combine the properties of both functionalized graphene and quantum dots, and are expected to promote further development of high-performance energy storage devices. Here, all-solid-state on-chip planar micro-supercapacitors (PMSCs) were fabricated based on aminated graphene quantum dots by modified liquid-gas interface self-assembly and photolithography, with the electrode width/gap of 24 mu m/8 mu m. The electrochemical performance was analyzed by cyclic voltammetry (CV), galvanostatic charge-discharge (GCD), electrochemical impedance spectrometry and cycle stability in PVA/H2SO4 gel electrolyte. The results indicated that the fabricated PMSCs showed good capacitive response at the scan rates of 0.01 V s-1 to 10000 V s-1. The CV curves of the PMSCs displayed a typical pseudocapacitive feature at the scan rates of 0.01 V s-1 to 1 V s-1. The PMSCs had ultrahigh rate capability of up to 10000 V s-1, and the GCD curves were near triangle-shaped curves, demonstrating excellent electrochemical reversibility. The PMSCs showed ideal capacitive behavior at the low frequency region of the Nyquist plot. The Nyquist plot of the PMSCs showed a semicircle at the high frequency region. The relaxation time constant of the PMSCs were 3.59 mu s, indicating that the PMSCs had fast frequency response. After 10000 charge-discharge cycles at the scan rate of 500 V s-1, the initial capacitance retention rate of the PMSCs were 99.17%, indicating that the PMSCs possessed good long-term electrochemical stability. This study provides an important reference for the application of functional graphene quantum dots in the field of the PMSCs.