Reaction dynamic process of low pressure discharge plasma in microwave resonant cavity

被引：0
|
作者：
Chen, Ze-Yu [1 ,2 ]
Peng, Yu-Bin [2 ]
Wang, Rui [1 ]
He, Yong-Ning [2 ]
Cui, Wan-Zhao [1 ]
机构：
[1] National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology (Xi’an), Xi’an,710000, China
[2] School of Microelectronics, Xi’an Jiaotong University, Xi’an,710049, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2022年 / 71卷 / 24期
关键词：
* Project supported by the National Natural Science Foundation of China (Grant No. 61901361);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] DOUBLE LANGMUIR PROBE DIAGNOSTIC OF A RESONANT-CAVITY MICROWAVE-DISCHARGE
    MCCOLL, W
    BROOKS, C
    BRAKE, ML
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1152 - 1155
  • [22] Continuum visible spectra from InBr discharge excited in a microwave resonant cavity
    Chen, Yuming
    Chen, Dahua
    APPLIED PHYSICS LETTERS, 2007, 91 (16)
  • [23] Production of nanodiamond composites in a low-pressure microwave gas-discharge plasma
    Yafarov, RK
    TECHNICAL PHYSICS, 2006, 51 (01) : 40 - 46
  • [24] MEASUREMENTS OF POWER TRANSFER TO OVERDENSE PLASMA IN LOW-PRESSURE MICROWAVE-DISCHARGE
    ZAKRZEWSKI, Z
    LUBANSKI, M
    KOPICZYNSKI, T
    MUSIL, GJ
    ACTA PHYSICA SLOVACA, 1982, 32 (3-4) : 201 - 204
  • [25] Production of nanodiamond composites in a low-pressure microwave gas-discharge plasma
    R. K. Yafarov
    Technical Physics, 2006, 51 : 40 - 46
  • [26] PLASMA DIAGNOSTICS OF LOW-PRESSURE MICROWAVE-ENHANCED DC SPUTTERING DISCHARGE
    MISINA, M
    MUSIL, J
    SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3): : 450 - 454
  • [27] THE DYNAMIC CHARACTERISTICS OF A LOW PRESSURE DISCHARGE
    BARNES, BT
    PHYSICAL REVIEW, 1952, 86 (03): : 351 - 358
  • [28] Plasma of capillary discharge of low pressure
    Smirnov, B. M.
    Tereshonok, D. V.
    EPL, 2014, 105 (03)
  • [29] Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharge
    Morrison, NA
    William, C
    Milne, WI
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (11) : 7031 - 7043
  • [30] Collisional-radiative modelling of a helium microwave plasma in a resonant cavity
    Belmonte, T.
    Cardoso, R. P.
    Henrion, G.
    Kosior, F.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (23) : 7343 - 7356
12345