Reaction dynamic process of low pressure discharge plasma in microwave resonant cavity

被引：0
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作者：
Chen, Ze-Yu [1 ,2 ]
Peng, Yu-Bin [2 ]
Wang, Rui [1 ]
He, Yong-Ning [2 ]
Cui, Wan-Zhao [1 ]
机构：
[1] National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology (Xi’an), Xi’an,710000, China
[2] School of Microelectronics, Xi’an Jiaotong University, Xi’an,710049, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2022年 / 71卷 / 24期
关键词：
* Project supported by the National Natural Science Foundation of China (Grant No. 61901361);
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