Dynamics Modeling and Synchronization Control of Clamped-Clamped Beam MEM Silicon Resonator

被引：0
|
作者：
Chang S. [1 ]
Sun J. [2 ]
机构：
[1] University of Electronic Science and Technology, China Zhongshan Institute, Guangdong, Zhongshan
[2] School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu
来源：
Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China | 2023年 / 52卷 / 03期
关键词：
dynamics model; MEM; silicon resonator; synchronization control;
D O I：
10.12178/1001-0548.2022371
中图分类号：
学科分类号：
摘要：
Non-linear factors such as periodic oscillation, bifurcation and chaos under the high-energy output of micro-electro-mechanical (MEM) silicon resonators will limit the accuracy of oscillation frequency control. This paper proposes an output feedback synchronous control method for clamped-clamped beam micro-electromechanical silicon resonators and improves its oscillation frequency control performance through oscillator synchronization. First, the system structure and nonlinear characteristics of the MEM silicon resonator with clamped-clamped beam MEM silicon resonators are analyzed and a dynamic model that fully considers the nonlinear characteristics of the system is established. On this basis, an output feedback synchronization controller based on synchronization error is designed, it can realize the synchronous control of multi-MEM silicon resonators and make the corresponding synchronous error asymptotically converge to zero. Finally, the effectiveness of the proposed method is proved by simulation experiments. © 2023 Univ. of Electronic Science and Technology of China. All rights reserved.
引用
收藏
页码：475 / 480
页数：5
相关论文
共 21 条
  • [1] CLARK T N., MEMS technology for timing and frequency control, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54, 2, pp. 251-270, (2007)
  • [2] NATHANSON H C, WICKSTROM R A., A resonant gate surface transistor with high-q bandpass properties, IEEE Transactions on Electron Devices, 12, 9, (1965)
  • [3] NATHANSON H C, Newell W E, WICKSTROM R A, Et al., The resonant gate transistor, IEEE Transactions on Electron Devices, 14, 3, pp. 117-133, (1967)
  • [4] KAAJAKARI V, MATTILA T, OJA A, Et al., Nonlinear limits for single-crystal silicon microresonators, Journal of Microelectromechanical Systems, 13, 5, pp. 715-724, (2004)
  • [5] MESTROM R M C, FEY R H B, PHAN K L, Et al., Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator, Sensors and Actuators A: Physical, 162, 2, pp. 225-234, (2010)
  • [6] BRAGHIN F, RESTA F, LEO E, Et al., Nonlinear dynamics of vibrating MEMS, Sensors and Actuators A: Physical, 134, 1, pp. 98-108, (2007)
  • [7] YOUNIS M I, NAYFEH A H., A study of the nonlinear response of a resonant microbeam to an electric actuation, Nonlinear Dynamics, 31, 1, pp. 91-117, (2003)
  • [8] DE S K, ALURU N R., Complex nonlinear oscillations in electrostatically actuated microstructures, Journal of Microelectromechanical Systems, 15, 2, pp. 355-369, (2006)
  • [9] CHEN C P, HU H T, DAI L M., Nonlinear behavior and characterization of a piezoelectric laminated microbeam system, Communications in Nonlinear Science and Numerical Simulation, 18, 5, pp. 1304-1315, (2013)
  • [10] CHAVARETTE F R, BALTHAZAR J M, FELIX J L P, Et al., A reducing of a chaotic movement to a periodic orbit, of a micro-electro-mechanical system, by using an optimal linear control design, Communications in Nonlinear Science and Numerical Simulation, 14, 5, pp. 1844-1853, (2009)
123