High-performance p+ Si/Au Thermopile-based Gas Flow Sensor in (111) Silicon and Its Packaging Technology

被引：0

作者：

Huang, Tao ^{[1
,2
]}

Wang, Jiachou ^{[1
,2
]}

Li, Xinxin ^{[1
,2
]}

机构：

[1] Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai,200050, China

[2] University of Chinese Academy of Sciences, Beijing,100049, China

来源：

Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2023年 / 59卷 / 02期

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D O I：

暂无

中图分类号：

学科分类号：

摘要：

Channel flow - Chip scale packages - Gases - Heat resistance - Signal processing - Silicon - Thermal insulation - Thermocouples

引用

页码：30 / 38