Piezoelectric Micromachined Ultrasonic Transducers Under Forced Vibration: Improving Acoustic Range and Reducing Dead Zone

被引:1
作者
Lyu, Haochen [1 ]
Xiu, Xueying [2 ]
Zhang, Songsong [3 ]
Yang, Haolin
Safari, Ahmad [1 ]
机构
[1] Rutgers State Univ, Dept Mat Sci & Engn, Piscataway, NJ 08854 USA
[2] Shanghai Melon Technol Inc, Shanghai 200000, Peoples R China
[3] Shanghai Ind Technol Res Inst, Shanghai 200000, Peoples R China
关键词
Resonant frequency; Vibrations; Sensors; Acoustics; Mathematical models; Ultrasonic transducers; Resonance; Axial resolution; forced vibration; piezoelectric micromachined ultrasonic transducer (PMUT); ringdown suppression; short-range detection; MICRO;
D O I
10.1109/JSEN.2024.3456297
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article delves into the enhancement of dynamic performance in piezoelectric micromachined ultrasonic transducers (PMUTs) under forced vibration in pulse-wave mode, with an emphasis on mitigating dead zone and enhancing axial resolution. The investigation begins with a theoretical framework that elucidates the relationship between the resonant frequency of the device and various excitation parameters, such as the applied frequency and the burst count. Empirical findings illustrate that the operation of PMUTs under forced vibration conditions significantly curtails the duration of ringdown by 40% compared with their resonant performance. Furthermore, acoustic range evaluations indicate that this methodology substantially reduces the dead zone by 37.5% and amplifies the axial resolution of echo signals by approximately 440%. The study concludes that the proposed technique, noted for its universality and straightforwardness, provides a robust solution for enhancing near-range detection capabilities in ultrasonic sensors, thereby heralding considerable progress in the domain of precise acoustic measurements. This article not only explicates the fundamental mechanisms but also substantiates the feasibility and efficacy of employing forced vibration in PMUT across diverse applications.
引用
收藏
页码:36451 / 36458
页数:8
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