A calculation method for positioning error of turntable based on harmonic function

被引：0

作者：

Shu Y. ^{[1
]}

Zhu W. ^{[1
]}

Huang Y. ^{[2
]}

Xue Z. ^{[2
]}

机构：

[1] School of Metrology and Measurement Engineering, China Jiliang University, Hangzhou

[2] National Institute of Metrology, Beijing

来源：

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2021年 / 42卷 / 12期

关键词：

CORDIC; Error compensation; Error modeling; Harmonic error; Positioning error;

D O I：

10.19650/j.cnki.cjsi.J2108471

中图分类号：

学科分类号：

摘要：

To ensure the accuracy of harmonic compensation value for the turntable positioning error, a calculating method for the harmonic error function is proposed. The harmonic compensation method for turntable positioning is described and the feasibility of the CORDIC algorithm for harmonic error function calculation is introduced in detail. Based on the principle of the CORDIC, the quantitative models of the iteration number n and the data width b are established, respectively. The overall quantization error of calculating harmonic function is deduced. The calculating method is implemented by using the laboratory-made field-programmable gate array circuit. The value of n and b are determined to satisfy the calculation accuracy. Finally, a series of evaluation tests are performed to demonstrate the effectiveness of the method by comparing theoretical and computational values. The data of experiment performed on the test turntable platform confirm that the proposed method can calculate the value of harmonic function effectively. The positioning accuracy of turntable is improved from 29.0" to 5.3" with this method. © 2021, Science Press. All right reserved.

引用

页码：9 / 17

页数：8

共 19 条

[1]

YANG Q X, WU Z L, HUANG M, Et al., An improved angle calibration method of a high-precision angle comparator, Metrology and Measurement Systems, 28, 1, pp. 181-190, (2021)

[2]

MOU J P, SU J J, HUANG T C., Research on data synchronization technology between rotary table and fiber optic gyroscope, Measurement, 173, 5, (2021)

[3]

CHEN L, ZHOU Y L, ZHANG D W, Et al., A dynamic angle metrology system based on fibre-optic gyroscope and rotary table, Metrology and Measurement Systems, 26, 3, pp. 497-504, (2019)

[4]

PROBST R, WITTEKOPF R, KRAUSE M, Et al., The new PTB angle comparator, Measurement Science and Technology, 9, pp. 1059-1066, (1998)

[5]

JONG A K, JAE W K., Precision angle comparator using self-calibration of scale errors based on the equal-division-averaged method, MacroScale, pp. 1-4, (2011)

[6]

WATANALE T, SAMIT W, VATCHARANUKUL K, Et al., High resolution self-A rotary table by the interpolation signal calibration, Key Engineering Materials, 625, pp. 53-59, (2015)

[7]

HUANG Y, XUE Z, QIAO D, Et al., Study on the metrological performance of self-calibration angle encoder, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologyies: Optical Test, Measurement Technology, and Equipment International Society for Optics and Photonics, 9684, (2016)

[8]

HUANG L, PAN N, MA W L, Et al., Error analysis and experimentation of scale tape encoder, Chinese Optics, 8, 3, pp. 464-470, (2015)

[9]

ZHOU B B., Research on error compensation technology for high accuracy circle gratings angle-measuring system, (2016)

[10]

ZHU D M., Research on error analysis and compensation of ultra-precision air floating turntable, (2016)

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