[1] Rice Univ, Houston, TX 77005 USA
[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[3] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
[4] Taiwan Semicond Mfg Co, Corp Res, San Jose, CA 95134 USA
[5] Intel Corp, Hillsboro, OR 97124 USA
[6] Harvard Univ, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[7] Taiwan Semicond Mfg Co, Corp Res, Hsinchu, Taiwan
[8] Natl Tsing Hua Univ, Hsinchu, Taiwan
[9] Univ Nebraska Lincoln, Nebraska Ctr Mat & Nanosci, Dept Phys & Astron, Lincoln, NE 68588 USA
[10] Natl Yang Ming Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
[11] Natl Yang Ming Chiao Tung Univ, Ind Acad Innovat Sch, Hsinchu, Taiwan
[12] Indian Inst Sci, Dept Mat Engn, Bengaluru 560012, KA, India
[13] Univ Wisconsin Madison, Dept Mat Sci & Engn, Madison, WI 53706 USA
[14] Lawrence Berkeley Natl Lab, Appl Math & Computat Res Div, Berkeley, CA 94720 USA
[15] Univ Arkansas, Phys Dept, Fayetteville, AR 72701 USA
[16] Tel Aviv Univ, Dept Mat Sci & Engn, IL-6997801 Tel Aviv, Israel
[17] MIT, Res Lab Elect, Cambridge, MA USA
[18] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN USA
[19] Purdue Univ, Elmore Family Sch Elect & Comp Engn, W Lafayette, IN USA
[20] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA USA
[21] Univ Texas Austin, Chandra Family Dept Elect & Comp Engn, Austin, TX USA
[22] Univ Texas Austin, Microelect Res Ctr, Austin, TX USA
[23] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
[24] Appl Mat Inc, Santa Clara, CA 95054 USA
[25] SLAC Natl Accelerator Lab, Stanford Inst Mat & Energy Sci, Menlo Pk, CA 94025 USA
[26] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[27] SLAC Natl Accelerator Lab, Stanford PULSE Inst, Stanford, CA 94025 USA
[28] Lawrence Berkeley Natl Lab, Natl Ctr Electron Microscopy & Mol Foundry, Berkeley, CA 94720 USA