Self-excited MEMS Oscillator using an Electrostatic Cantilever

被引:0
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作者
Mita, Makoto [1 ]
Toshiyoshi, Hiroshi [2 ]
机构
[1] Institute of Space and Astronautical Science, The Japan Aerospace Exploration Agency, 3-1-1, Yoshino-dai, Chuo-ku, Kanagawa, Sagamihara,252-5210, Japan
[2] Institute of Industrial Science, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo,153-8505, Japan
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Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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学科分类号
摘要
Electric discharges - Electrostatic devices - Electrostatic force - Nanocantilevers - Oscillistors - Variable frequency oscillators
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页码:55 / 61
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