Self-excited MEMS Oscillator using an Electrostatic Cantilever

被引：0

作者：

Mita, Makoto ^{[1
]}

Toshiyoshi, Hiroshi ^{[2
]}

机构：

[1] Institute of Space and Astronautical Science, The Japan Aerospace Exploration Agency, 3-1-1, Yoshino-dai, Chuo-ku, Kanagawa, Sagamihara,252-5210, Japan

[2] Institute of Industrial Science, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo,153-8505, Japan

来源：

IEEJ Transactions on Sensors and Micromachines | 2023年 / 143卷 / 04期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Electric discharges - Electrostatic devices - Electrostatic force - Nanocantilevers - Oscillistors - Variable frequency oscillators

引用

页码：55 / 61

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