Self-excited MEMS Oscillator using an Electrostatic Cantilever

被引：0
|
作者：
Mita, Makoto [1 ]
Toshiyoshi, Hiroshi [2 ]
机构：
[1] Institute of Space and Astronautical Science, The Japan Aerospace Exploration Agency, 3-1-1, Yoshino-dai, Chuo-ku, Kanagawa, Sagamihara,252-5210, Japan
[2] Institute of Industrial Science, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo,153-8505, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2023年 / 143卷 / 04期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
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中图分类号：
学科分类号：
摘要：
Electric discharges - Electrostatic devices - Electrostatic force - Nanocantilevers - Oscillistors - Variable frequency oscillators
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页码：55 / 61
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