Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

被引：1

作者：

Duan, Junyu ^{[1
]}

Long, Gui ^{[1
]}

Xu, Xu ^{[2
,3
]}

Liu, Weiming ^{[4
]}

Li, Chuankun ^{[4
]}

Chen, Liang ^{[5
,6
]}

Zhang, Jianguo ^{[1
]}

Xiao, Junfeng ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, State Key Lab Intelligent Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[2] Hubei Jiuzhiyang Infrared Syst CO LTD, Wuhan 430223, Peoples R China

[3] Huazhong Inst Electroopt, Wuhan Natl Lab Optoelect, Wuhan 430223, Peoples R China

[4] China Ship Dev & Design Ctr, Wuhan 430064, Peoples R China

[5] Midea Grp, State Key Lab High End Heavy Load Robots, Foshan 528300, Peoples R China

[6] Midea Corp Res Ctr, Foshan 528311, Peoples R China

来源：

MICROMACHINES | 2024年 / 15卷 / 11期

基金：

中国国家自然科学基金;

关键词：

micro/nano structures; anti-reflection; superhydrophobicity; femtosecond laser; durability; ALUMINUM SURFACE; ROBUST; DUST; RESISTANCE; COATINGS; GLASS;

D O I：

10.3390/mi15111304

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluorosilane modification (PM). The reflectivity and hydrophobicity's influence mechanisms of structural height, duty cycle, and size are experimentally elucidated. The average reflectivity of the silicon surface in the visible light band is reduced to 3.0% under the optimal parameters, and the surface exhibits a large contact angle of 172.3 +/- 0.8 degrees and a low sliding angle of 4.2 +/- 1.4 degrees. Finally, the durability of the anti-reflection and superhydrophobicity is also confirmed. This study deepens our understanding of the principles of anti-reflection and superhydrophobicity and expands the design and preparation methods for self-cleaning and anti-reflective surfaces.

引用

页数：13

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