Gray-scale mask technique for microlens device of integrated near-field optical head

被引:0
|
作者
Zhang, Xin-Yu [1 ]
Pei, Xian-Deng [1 ]
Xie, Chang-Sheng [1 ]
机构
[1] Coll. of Comp. Sci. and Technol., Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
来源
Guangxue Jishu/Optical Technique | 2002年 / 28卷 / 04期
关键词
Gray scale mask technique - Optical head;
D O I
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学科分类号
摘要
(Edited Abstract)
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页码:291 / 292
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