Gray-scale mask technique for microlens device of integrated near-field optical head

被引：0
|
作者：
Zhang, Xin-Yu [1 ]
Pei, Xian-Deng [1 ]
Xie, Chang-Sheng [1 ]
机构：
[1] Coll. of Comp. Sci. and Technol., Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
来源：
Guangxue Jishu/Optical Technique | 2002年 / 28卷 / 04期
关键词：
Gray scale mask technique - Optical head;
D O I：
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中图分类号：
学科分类号：
摘要：
(Edited Abstract)
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页码：291 / 292
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