Modification of fluorinated Al2O3 surface by irradiating H2 and O2 plasmas

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作者：
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan [1 ]
不详 [2 ]
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来源：
Jpn. J. Appl. Phys. | / 12卷
关键词：
804.2 Inorganic Compounds - 931.2 Physical Properties of Gases; Liquids and Solids;
D O I：
126002
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摘要：
21
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