Atmospheric pressure fluorocarbon-particle plasma chemical vapor deposition for hydrophobic film coating

被引：0
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作者：
Nagai, Mikio [1 ]
Takai, Osamu [2 ]
Hori, Masaru [1 ]
机构：
[1] Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagaya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
[2] EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2006年 / 45卷 / 17-19期
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